KATARI, M. .; SHANMUGAM , L. .; ARASU MALAIYAPPAN, J. N. . Integration of AI and Machine Learning in Semiconductor Manufacturing for Defect Detection and Yield Improvement. Journal of Artificial Intelligence General science (JAIGS) ISSN:3006-4023, [S. l.], v. 3, n. 1, p. 418–431, 2024. DOI: 10.60087/jaigs.v3i1.191. Disponível em: https://ojs.boulibrary.com/index.php/JAIGS/article/view/191. Acesso em: 18 sep. 2024.